화학공학소재연구정보센터
검색결과 : 8건
No. Article
1 Large-area flexible 3D optical negative index metamaterial formed by nanotransfer printing
Chanda D, Shigeta K, Gupta S, Cain T, Carlson A, Mihi A, Baca AJ, Bogart GR, Braun P, Rogers JA
Nature Nanotechnology, 6(7), 402, 2011
2 Three-dimensional nanofabrication with elastomeric phase masks
Shir DJ, Jeon S, Liao H, Highland M, Cahill DG, Su MF, El-Kady IF, Christodoulou CG, Bogart GR, Hamza AV, Rogers JA
Journal of Physical Chemistry B, 111(45), 12945, 2007
3 Investigation of fluorocarbon plasma deposition from c-C4F8 for use as passivation during deep silicon etching
Labelle CB, Donnelly VM, Bogart GR, Opila RL, Kornblit A
Journal of Vacuum Science & Technology A, 22(6), 2500, 2004
4 Pattern placement correction methodology for 200 mm SCALPEL masks
Ocola LE, Farrow RC, Kasica RJ, Caminos CG, Rutberg L, Fullowan RF, Teffeau K, Blakey MI, Peabody ML, Knurek CS, Bogart GR, Novembre AE, Liddle JA, Lercel M, Magg C, Collins K, Trybendis M, Cadwell N, Jeffer R, Dauksher WJ, Resnick DJ, Mancini D, Han SI, Masnyj Z, Smith K, Mangat PJS
Journal of Vacuum Science & Technology B, 19(6), 2659, 2001
5 Deposition of SiO2 films from novel alkoxysilane/O-2 plasmas
Bogart KHA, Ramirez SK, Gonzales LA, Bogart GR, Fisher ER
Journal of Vacuum Science & Technology A, 16(6), 3175, 1998
6 Plasma-Enhanced Chemical-Vapor-Deposition of SiO2 Using Novel Alkoxysilane Precursors
Bogart KH, Dalleska NF, Bogart GR, Fisher ER
Journal of Vacuum Science & Technology A, 13(2), 476, 1995
7 Investigation of Amine-Catalyzed Alkoxysilane-Modified Cab-O-Sil by Drift Spectroscopy
Bogart GR, Leyden DE
Journal of Colloid and Interface Science, 167(1), 18, 1994
8 Investigation of Amine-Catalyzed Gas-Phase Adsorption Silylation Reactions with Alkoxysilanes
Bogart GR, Leyden DE
Journal of Colloid and Interface Science, 167(1), 27, 1994