검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
High-current electron optical design for reflective electron beam lithography direct write lithography McCord M, Kojima S, Petric P, Brodie A, Sun J Journal of Vacuum Science & Technology B, 28(6), C6C1, 2010 |
| 2 |
Reflective electron beam lithography: A maskless ebeam direct write lithography approach using the reflective electron beam lithography concept Petric P, Bevis C, McCord M, Carroll A, Brodie A, Ummethala U, Grella L, Cheung A, Freed R Journal of Vacuum Science & Technology B, 28(6), C6C6, 2010 |
| 3 |
REBL: A novel approach to high speed maskless electron beam direct write lithography Petric P, Bevis C, Carroll A, Percy H, Zywno M, Standiford K, Brodie A, Bareket N, Grella L Journal of Vacuum Science & Technology B, 27(1), 161, 2009 |