검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Optimized cleaning and conditioning of a five station tetrakis diethylamido titanium chemical vapor deposition TiN chamber Whelan CS, Bulger JM, Dumont A, Clark J, Kuhn M Journal of Vacuum Science & Technology B, 17(1), 194, 1999 |
| 2 |
Investigating the process latitude of a low temperature metalorganic chemical vapor deposition TiNitride process Bulger JM, Whelan CS, Dumont A, Kuhn M, Clark J Journal of Vacuum Science & Technology B, 17(2), 410, 1999 |
| 3 |
Integration of chemical vapor deposition titanium nitride for 0.25 mu m contacts and vias Westerheim AC, Bulger JM, Whelan CS, Sriram TS, Elliott LJ, Maziarz JJ Journal of Vacuum Science & Technology B, 16(5), 2729, 1998 |