검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Progress in Mask Technology for Ion-Implantation Based Nanofabrication Burkard M, Griesinger UA, Menschig A, Schweizer H, Klein H, Bohm G, Trankle G, Weimann G Journal of Vacuum Science & Technology B, 12(6), 3677, 1994 |
| No. | Article |
|---|---|
| 1 |
Progress in Mask Technology for Ion-Implantation Based Nanofabrication Burkard M, Griesinger UA, Menschig A, Schweizer H, Klein H, Bohm G, Trankle G, Weimann G Journal of Vacuum Science & Technology B, 12(6), 3677, 1994 |