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| No. | Article |
|---|---|
| 1 |
Controlling gate-CD uniformity by means of a CD prediction model and wafer-temperature distribution control Kanno S, Miya G, Tanaka J, Masuda T, Kuwahara K, Sakaguchi M, Makino A, Tsubone T, Fujii T Thin Solid Films, 515(12), 4941, 2007 |