검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Quantitative evaluation of implantation damage and damage recovery after room temperature ion-implantation of N+ and P+ ions in 6H-SiC Blanque S, Perez R, Zielinski M, Pernot J, Mestres N, Pascual J, Godignon P, Camassell J Materials Science Forum, 433-4, 653, 2002 |