화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 PE-TEOS Wafer Bonding Enhancement at Low Temperature with a High-kappa Dielectric Capping Layer of Al2O3
Chong GY, Tan CS
Journal of the Electrochemical Society, 158(2), H137, 2011
2 Low Temperature Wafer Bonding of Low-kappa Carbon Doped Oxide (CDO) for High Performance 3D IC Application
Tan CS, Chong GY
Journal of the Electrochemical Society, 158(11), H1107, 2011
3 Nano-ZnCo2O4 Material Preparation by Molten Salt Method and Its Electrochemical Properties for Lithium Batteries
Reddy MV, Kenrick KYH, Wei TY, Chong GY, Leong GH, Chowdari BVR
Journal of the Electrochemical Society, 158(12), A1423, 2011
4 Low Temperature Wafer Bonding of Low-kappa Carbon-Doped Oxide for Application in 3D Integration
Tan CS, Chong GY
Electrochemical and Solid State Letters, 13(2), H27, 2010
5 Low Temperature PE-TEOS Oxide Bonding Assisted by a Thin Layer of High-kappa Dielectric
Chong GY, Tan CS
Electrochemical and Solid State Letters, 12(11), H408, 2009