검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
High rate reactive sputtering using gas pulsing: a technique for the creation of films onto large, fat substrates Howson RP, Danson N, Safi I Thin Solid Films, 351(1-2), 32, 1999 |
| 2 |
Improved Control Techniques for the Reactive Magnetron Sputtering of Silicon to Produce Silicon-Oxide and the Implications for Selected Film Properties Danson N, Hall GW, Howson RP Thin Solid Films, 289(1-2), 99, 1996 |