검색결과 : 4건
No. | Article |
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1 |
Considering a feed system upgrade? Fully integrated systems bring reliable, performance-based chemical feed to critical water and wastewater applications Armenta M, DeMarco J Chemical Processing, 66(2), 37, 2003 |
2 |
Multiple-Layer Blank Structure for Phase-Shifting Mask Fabrication Pierrat C, Siegrist T, Demarco J, Harriott L, Vaidya S Journal of Vacuum Science & Technology B, 14(1), 63, 1996 |
3 |
Multilayer Inorganic Antireflective System for Use in 248 nm Deep-Ultraviolet Lithography Cirelli RA, Weber GR, Kornblit A, Baker RM, Klemens FP, Demarco J, Pai CS Journal of Vacuum Science & Technology B, 14(6), 4229, 1996 |
4 |
Repair of Phase-Shifting Mask Defects Using a Novel Planarization Technique with Conventional Blanks Pierrat C, Demarco J, Vella RM, Vaidya S, Rolfson B, Johnson JC Journal of Vacuum Science & Technology B, 12(5), 3057, 1994 |