화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Considering a feed system upgrade? Fully integrated systems bring reliable, performance-based chemical feed to critical water and wastewater applications
Armenta M, DeMarco J
Chemical Processing, 66(2), 37, 2003
2 Multiple-Layer Blank Structure for Phase-Shifting Mask Fabrication
Pierrat C, Siegrist T, Demarco J, Harriott L, Vaidya S
Journal of Vacuum Science & Technology B, 14(1), 63, 1996
3 Multilayer Inorganic Antireflective System for Use in 248 nm Deep-Ultraviolet Lithography
Cirelli RA, Weber GR, Kornblit A, Baker RM, Klemens FP, Demarco J, Pai CS
Journal of Vacuum Science & Technology B, 14(6), 4229, 1996
4 Repair of Phase-Shifting Mask Defects Using a Novel Planarization Technique with Conventional Blanks
Pierrat C, Demarco J, Vella RM, Vaidya S, Rolfson B, Johnson JC
Journal of Vacuum Science & Technology B, 12(5), 3057, 1994