검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Structural change of direct silicon bonding substrates by interfacial oxide out-diffusion annealing Kato T, Nakamura Y, Kikkawa J, Sakai A, Toyoda E, Izunome K, Nakatsuka O, Zaima S, Imai Y, Kimura S, Sakata O Thin Solid Films, 518, S147, 2010 |
| 2 |
Microstructures in directly bonded Si substrates Ohara Y, Ueda T, Sakai A, Nakatsuka O, Ogawa M, Zaima S, Toyoda E, Isogai H, Senda T, Izunome K, Tajiri H, Sakata O, Kimura S, Sakata T, Mori H Solid-State Electronics, 53(8), 837, 2009 |