검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Monte-Carlo Simulation of the Variation of a Binary Alloy Film Composition Due to Intrinsic Resputtering Using Different Working Gases Bauer W, Betz G, Bangert H, Bergauer A, Eisenmengersittner C Thin Solid Films, 281-282, 68, 1996 |
| 2 |
Angular-Distribution of Sputtered Neutrals in a Post Magnetron Geometry - Measurement and Monte-Carlo Simulation Eisenmengersittner C, Beyerknecht R, Bergauer A, Bauer W, Betz G Journal of Vacuum Science & Technology A, 13(5), 2435, 1995 |
| 3 |
Whisker Growth on Sputtered Alsn (20-Wt-Percent Sn) Films Bergauer A, Bangert H, Eisenmengersittner C, Barna PB Thin Solid Films, 258(1-2), 115, 1995 |
| 4 |
Measurement of the Angular-Distribution of Sputtered Neutrals in a Planar Magnetron Geometry Eisenmengersittner C, Bergauer A, Bangert H, Bauer W Journal of Vacuum Science & Technology A, 12(2), 536, 1994 |
| 5 |
Intrinsic Resputtering During Film Deposition Investigated by Monte-Carlo Simulation Bauer W, Betz G, Bangert H, Bergauer A, Eisenmengersittner C Journal of Vacuum Science & Technology A, 12(6), 3157, 1994 |