검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
A One-Step Shallow Trench Global Planarization Process Using Chemical-Mechanical Polishing Boyd JM, Ellul JP Journal of the Electrochemical Society, 144(5), 1838, 1997 |
| 2 |
Near-Global Planarization of Oxide-Filled Shallow Trenches Using Chemical-Mechanical Polishing Boyd JM, Ellul JP Journal of the Electrochemical Society, 143(11), 3718, 1996 |