검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Laser activation of Ultra Shallow Junctions (USJ) doped by Plasma Immersion Ion Implantation (PIII) Vervisch V, Larmande Y, Delaporte P, Sarnet T, Sentis M, Etienne H, Torregrosa F, Cristiano F, Fazzini PF Applied Surface Science, 255(10), 5647, 2009 |
| 2 |
Realization of ultrashallow junctions by plasma immersion ion implantation and laser annealing Vervisch V, Etienne H, Torregrosa F, Roux L, Ottaviani L, Pasquinelli M, Sarnet T, Delaporte P Journal of Vacuum Science & Technology B, 26(1), 286, 2008 |
| 3 |
Micro and nano-structuration of silicon by femtosecond laser: Application to silicon photovoltaic cells fabrication Halbwax M, Sarnet T, Delaporte P, Sentis A, Etienne H, Torregrosa F, Vervisch V, Perichaud I, Martinuzzi S Thin Solid Films, 516(20), 6791, 2008 |