검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Development of an Energetic Ion-Assisted Mixing and Deposition Process for TiNx and Diamond-Like Carbon-Films, Using a Coaxial Geometry in Plasma Source Ion-Implantation Malik SM, Fetherston RP, Conrad JR Journal of Vacuum Science & Technology A, 15(6), 2875, 1997 |
| 2 |
Overview of Plasma Source Ion-Implantation Research at University-of-Wisconsin-Madison Malik SM, Sridharan K, Fetherston RP, Chen A, Conrad JR Journal of Vacuum Science & Technology B, 12(2), 843, 1994 |
| 3 |
Sputter-Deposition of Tantalum-Nitride Films on Copper Using an RF-Plasma Walter KC, Fetherston RP, Sridharan K, Chen A, Shamim MM, Conrad JR Materials Research Bulletin, 29(8), 827, 1994 |