화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Atomistic comparative study of VUV photodeposited silicon nitride on InP(100) by simulation and atomic force microscopy
Flicstein J, Guillonneau E, Marquez J, Chun LSHK, Maisonneuve D, David C, Wang Z, Palmier JF, Courant JL
Applied Surface Science, 154, 337, 2000
2 Very high-resolution focused ion beam nanolithography improvement: A new three-dimensional patterning capability
Gierak J, Cambril E, Schneider M, David C, Mailly D, Flicstein J, Schmid G
Journal of Vacuum Science & Technology B, 17(6), 3132, 1999