검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Development of self-aligned contact technology for 0.18 mu m static random access memory devices Qiao JM, Jin B, Phatak P, Yu JY, Geha S Journal of Vacuum Science & Technology B, 17(5), 2373, 1999 |
| No. | Article |
|---|---|
| 1 |
Development of self-aligned contact technology for 0.18 mu m static random access memory devices Qiao JM, Jin B, Phatak P, Yu JY, Geha S Journal of Vacuum Science & Technology B, 17(5), 2373, 1999 |