검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Metrology study of structural transfer accuracy in fabrication of high-aspect-ratio microelectromechanical systems: From optical mask to polished electroplated parts Malek CK, Wood R, Dudley B, Genova P Journal of Vacuum Science & Technology B, 16(6), 3552, 1998 |