검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
"Volcano" reactions in oxide vias between tungsten CVD and bias sputtered TiN/Ti films Herner SB, Tanaka Y, Zhang H, Ghanayem SG Journal of the Electrochemical Society, 147(5), 1982, 2000 |
| No. | Article |
|---|---|
| 1 |
"Volcano" reactions in oxide vias between tungsten CVD and bias sputtered TiN/Ti films Herner SB, Tanaka Y, Zhang H, Ghanayem SG Journal of the Electrochemical Society, 147(5), 1982, 2000 |