화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Performance Synthesis of Multiple Input-Multiple Output (MIMO) Exponentially Weighted Moving Average (EWMA) Run-to-Run Controllers with Metrology Delay
Good R, Qin SJ
Industrial & Engineering Chemistry Research, 50(3), 1400, 2011
2 Missing data estimation for run-to-run EWMA-controlled processes
Prabhu AV, Edgar TF, Good R
Computers & Chemical Engineering, 33(11), 1861, 2009
3 Semiconductor manufacturing process control and monitoring: A fab-wide framework
Qin SJ, Cherry G, Good R, Wang J, Harrison CA
Journal of Process Control, 16(3), 179, 2006