검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Proposal for an etching mechanism of InP in CH4-H-2 mixtures based on plasma diagnostics and surface analysis Feurprier Y, Cardinaud C, Grolleau B, Turban G Journal of Vacuum Science & Technology A, 16(3), 1552, 1998 |
| 2 |
Neon Ion-Beam-Induced Surface-Reactions of SF6 Adsorbed Molecules with Silicon at Low-Temperature Royer J, Tessier PY, Grolleau B, Turban G Journal of Vacuum Science & Technology A, 14(1), 234, 1996 |