화학공학소재연구정보센터
검색결과 : 39건
No. Article
1 Metastable argon atoms under significant neutral depletion in helicon plasmas by laser-induced fluorescence
Seo BH, Kim JH, You SJ
Current Applied Physics, 17(10), 1254, 2017
2 One-Step Synthesis of Silicon Oxynitride Films Using a Steady-State and High-Flux Helicon-Wave Excited Nitrogen Plasma
Huang TY, Jin CG, Yu J, Yang Y, Zhuge LJ, Wu XM, Sha ZD
Plasma Chemistry and Plasma Processing, 37(4), 1237, 2017
3 Measurements of electron energy probability functions in helicon discharge by laser Thomson scattering
Seo BH, You SJ, Kim JH, Seong DJ, Shin YH, Chang HY
Thin Solid Films, 547, 52, 2013
4 Self-consistent simulation study on magnetized inductively coupled plasma for 450 mm semiconductor wafer processing
Lee HJ, Kim YG
Thin Solid Films, 521, 78, 2012
5 Heat flux estimation of a plasma rocket helicon source by solution of the inverse heat conduction problem
Mulcahy JM, Browne DJ, Stanton KT, Diaz FRC, Cassady LD, Berisford DF, Bengtson RD
International Journal of Heat and Mass Transfer, 52(9-10), 2343, 2009
6 Effect of substrate temperature on the room-temperature ferromagnetism of Cu-doped ZnO films
Ran FY, Tanemura M, Hayashi Y, Hihara T
Journal of Crystal Growth, 311(17), 4270, 2009
7 The effect of defects on the optical nonlinearity of thermally poled SiOx thin films
Li WT, Boswell R, Samoc A, Samoc A, Wang RP
Thin Solid Films, 516(16), 5474, 2008
8 Helicon Plasma-Enhanced Chemical Vapor Decomposition 에 의한 Carbon Nanotubes의 합성 및 표면 위에 금속 나노 입자의 코팅
윤옥자, 윤국로, 문성민, 정재국
Applied Chemistry, 10(1), 93, 2006
9 Plasma propulsion for interplanetary flight
Chang-Diaz FR
Thin Solid Films, 506, 449, 2006
10 Production and application of reactive plasmas using helicon-wave discharge in very low magnetic fields
Sato G, Kato T, Oohara W, Hatakeyama R
Thin Solid Films, 506, 550, 2006