1 |
Metastable argon atoms under significant neutral depletion in helicon plasmas by laser-induced fluorescence Seo BH, Kim JH, You SJ Current Applied Physics, 17(10), 1254, 2017 |
2 |
One-Step Synthesis of Silicon Oxynitride Films Using a Steady-State and High-Flux Helicon-Wave Excited Nitrogen Plasma Huang TY, Jin CG, Yu J, Yang Y, Zhuge LJ, Wu XM, Sha ZD Plasma Chemistry and Plasma Processing, 37(4), 1237, 2017 |
3 |
Measurements of electron energy probability functions in helicon discharge by laser Thomson scattering Seo BH, You SJ, Kim JH, Seong DJ, Shin YH, Chang HY Thin Solid Films, 547, 52, 2013 |
4 |
Self-consistent simulation study on magnetized inductively coupled plasma for 450 mm semiconductor wafer processing Lee HJ, Kim YG Thin Solid Films, 521, 78, 2012 |
5 |
Heat flux estimation of a plasma rocket helicon source by solution of the inverse heat conduction problem Mulcahy JM, Browne DJ, Stanton KT, Diaz FRC, Cassady LD, Berisford DF, Bengtson RD International Journal of Heat and Mass Transfer, 52(9-10), 2343, 2009 |
6 |
Effect of substrate temperature on the room-temperature ferromagnetism of Cu-doped ZnO films Ran FY, Tanemura M, Hayashi Y, Hihara T Journal of Crystal Growth, 311(17), 4270, 2009 |
7 |
The effect of defects on the optical nonlinearity of thermally poled SiOx thin films Li WT, Boswell R, Samoc A, Samoc A, Wang RP Thin Solid Films, 516(16), 5474, 2008 |
8 |
Helicon Plasma-Enhanced Chemical Vapor Decomposition 에 의한 Carbon Nanotubes의 합성 및 표면 위에 금속 나노 입자의 코팅 윤옥자, 윤국로, 문성민, 정재국 Applied Chemistry, 10(1), 93, 2006 |
9 |
Plasma propulsion for interplanetary flight Chang-Diaz FR Thin Solid Films, 506, 449, 2006 |
10 |
Production and application of reactive plasmas using helicon-wave discharge in very low magnetic fields Sato G, Kato T, Oohara W, Hatakeyama R Thin Solid Films, 506, 550, 2006 |