화학공학소재연구정보센터
Applied Chemistry, Vol.10, No.1, 93-96, May, 2006
Helicon Plasma-Enhanced Chemical Vapor Decomposition 에 의한 Carbon Nanotubes의 합성 및 표면 위에 금속 나노 입자의 코팅
Metal-nano particles coated on the surface of CNTs and synthesize of MWCNTs by Helicon Plasma-Enhanced Chemical Vapor Decomposition
Multi-wall carbon nanotubes(MWCNTs) were synthesized by Helicon Plasma-Enhanced Chemical Vapor Decomposition (helicon-PECVD), and metal nano-particle coating on the surface of cabon nanotubes was performed with helicon-PECVD. We used CO as a carrier gas and ferrocene as catalyst, and then we successfully obtained the MWCNTs, diameter of 10nm. The structural and morphological properties of MWCNTs were investigated by scanning electron microscopy (SEM), high resolution transmission electron microscopy (HR-TEM), Raman spectroscopy. Also, using H2 plasma treatment with ferroncene, we coated metal nano particles on purified CNTs(metal CNTs). Metal-CNTs were confirmed using EDX, SEM and Raman spectroscopy.