검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Sensor Systems for Real-Time Feedback-Control of Reactive Ion Etching Benson TE, Kamlet LI, Ruegsegger SM, Hanish CK, Hanish PD, Rashap BA, Klimecky P, Freudenberg JS, Grizzle JW, Khargonekar PP, Terry FL, Barney B Journal of Vacuum Science & Technology B, 14(1), 483, 1996 |
| 2 |
A Model-Based Technique for Real-Time Estimation of Absolute Fluorine Concentration in a CF4/Ar Plasma Hanish PD, Grizzle JW, Giles MD, Terry FL Journal of Vacuum Science & Technology A, 13(3), 1802, 1995 |