검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Polybenzoxazole/graphene nanocomposite for etching hardmask Shin SW, Kim JS, Kim SJ, Kim DW, Jung HT Journal of Industrial and Engineering Chemistry, 75, 296, 2019 |
| 2 |
Introduction of zirconium oxide in a hardmask concept for highly selective patterning of scaled high aspect ratio trenches in silicon Paul J, Riedel S, Rudolph M, Wege S, Czernohorsky M, Sundqvist J, Hohle C, Beyer V Thin Solid Films, 520(14), 4527, 2012 |