검색결과 : 11건
| No. | Article |
|---|---|
| 1 |
Impact of supercritical CO2 drying on roughness of hydrogen silsesquioxane e-beam resist Kupper D, Kupper D, Wahlbrink T, Henschel W, Bolten J, Lemme MC, Georgiev YM, Kurz H Journal of Vacuum Science & Technology B, 24(2), 570, 2006 |
| 2 |
Contactless capturing of particles in liquid using pulsed alternating dielectrophoresis Luo CP, Heeren A, Henschel W, Fleischer M, Kern DP Journal of Vacuum Science & Technology B, 24(6), 3184, 2006 |
| 3 |
Characterization and operation of a mechanically actuated silicon microgripper Blideran MM, Fleischer M, Henschel W, Kern DP, Sterr J, Schock K, Kleindiek S, Langer MG, Loffler K, Grauvogel F Journal of Vacuum Science & Technology B, 24(6), 3239, 2006 |
| 4 |
High resolution electron beam lithography using a chemically amplified calix[4]arene based resist Sailer H, Ruderisch A, Henschel W, Schurig V, Kern DP Journal of Vacuum Science & Technology B, 22(6), 3485, 2004 |
| 5 |
Subthreshold behavior of triple-gate MOSFETs on SOI material Lemme MC, Mollenhauer T, Henschel W, Wahlbrink T, Baus M, Winkler O, Granzner R, Schwierz F, Spangenberg B, Kurz H Solid-State Electronics, 48(4), 529, 2004 |
| 6 |
Electrical characterization of 12 nm EJ-MOSFETs on SOI substrates Henschel W, Wahlbrink T, Georgiev YM, Lemme M, Mollenhauer T, Vratzov B, Fuchs A, Kurz H, Kittler M, Schwierz F Solid-State Electronics, 48(5), 739, 2004 |
| 7 |
Study of a high contrast process for hydrogen silsesquioxane as a negative tone electron beam resist Henschel W, Georgiev YM, Kurz H Journal of Vacuum Science & Technology B, 21(5), 2018, 2003 |
| 8 |
Large scale ultraviolet-based nanoimprint lithography Vratzov B, Fuchs A, Lemme M, Henschel W, Kurz H Journal of Vacuum Science & Technology B, 21(6), 2760, 2003 |
| 9 |
Fabrication of 12 nm electrically variable shallow junction metal-oxide-semiconductor field effect transistors on silicon on insulator substrates Henschel W, Wahlbrink T, Geogriev YM, Lemme M, Mollenhauer T, Vratzov B, Fuchs A, Kurz H Journal of Vacuum Science & Technology B, 21(6), 2975, 2003 |
| 10 |
Simulation and optimization of EJ-MOSFETs Kittler M, Granzner R, Schwierz F, Henschel W, Wahlbrink T, Kurz H Solid-State Electronics, 47(7), 1193, 2003 |