검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Novel Electrostatic Column for Ion Projection Lithography Chalupka A, Stengl G, Buschbeck H, Lammer G, Vonach H, Fischer R, Hammel E, Loschner H, Nowak R, Wolf P, Finkelstein W, Hill RW, Berry IL, Harriott LR, Melngailis J, Randall JN, Wolfe JC, Stroh H, Wollnik H, Mondelli AA, Petillo JJ, Leung K Journal of Vacuum Science & Technology B, 12(6), 3513, 1994 |
| 2 |
Experimental Investigation of Stochastic Space-Charge Effects on Pattern Resolution in Ion Projection Lithography Systems Hammel E, Chalupka A, Fegerl J, Fischer R, Lammer G, Loschner H, Malek L, Nowak R, Stengl G, Vonach H, Wolf P, Brunger WH, Buchmann LM, Torkler M, Cekan E, Fallmann W, Paschke F, Stangl G, Thalinger F, Berry IL, Harriott LR, Finkelstein W, Hill RW Journal of Vacuum Science & Technology B, 12(6), 3533, 1994 |
| 3 |
Projection Ion-Beam Lithography Loschner H, Stengl G, Chalupka A, Fegerl J, Fischer R, Hammel E, Lammer G, Malek L, Nowak R, Traher C, Vonach H, Wolf P, Hill RW Journal of Vacuum Science & Technology B, 11(6), 2409, 1993 |