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Role of chamber pressure on crystallinity and composition of silicon films using silane and methane as precursors in hot-wire chemical vapour deposition technique Madaka R, Kumari J, Kanneboina V, Jha HS, Agarwal P Thin Solid Films, 682, 126, 2019 |
2 |
Poole-Frenkel emission and defect density in a-Si:H/nc-Si:H multilayer films for "all silicon" third generation photovoltaics Kherodia A, Panchal AK Thin Solid Films, 654, 16, 2018 |
3 |
Problem of catalyst ageing during the hot-wire chemical vapour deposition of thin silicon films Hrunski D, Scheib M, Mertz M, Schroeder B Thin Solid Films, 517(11), 3370, 2009 |
4 |
Hot wire CVD deposition of nanocrystalline silicon solar cells on rough substrates Li HBBT, van der Werf KHM, Rath JK, Schropp REI Thin Solid Films, 517(12), 3476, 2009 |
5 |
Improved deposition rates for mu c-Si : H at low substrate temperature Klein S, Finger F, Carius R, Lossen J Thin Solid Films, 501(1-2), 43, 2006 |
6 |
Low substrate temperature deposition of crystalline SiC using HWCVD Klein S, Carius R, Finger F, Houben L Thin Solid Films, 501(1-2), 169, 2006 |
7 |
Microcrystalline silicon films and solar cells deposited by PECVD and HWCVD Klein S, Repmann T, Brammer T Solar Energy, 77(6), 893, 2004 |
8 |
The influence of the filament temperature on the structure of hot-wire deposited silicon van der Werf CHM, van Veenendaal PATT, van Veen MK, Hardeman AJ, Rusche MYS, Rath JK, Schropp REI Thin Solid Films, 430(1-2), 46, 2003 |
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Deposition of HWCVD poly-Si films at a high growth rate Rath JK, Hardeman AJ, van der Werf CHM, van Veenendaal PATT, Rusche MYS, Schropp REI Thin Solid Films, 430(1-2), 67, 2003 |
10 |
Revisiting the B-factor variation in a-SiC : H deposited by HWCVD Swain BP, Patil SB, Kumbhar A, Dusane RO Thin Solid Films, 430(1-2), 186, 2003 |