검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Improved Within-Wafer Uniformity Modeling Through the Use of Maximum-Likelihood-Estimation of the Mean and Covariance Surfaces Davis JC, Hughesoliver JM, Lu JC, Gyurcsik RS Journal of the Electrochemical Society, 143(10), 3404, 1996 |
| 2 |
Improved Within-Wafer Uniformity Modeling Through the Use of Maximum-Likelihood-Estimation of the Mean and Covariance Surfaces (Vol 143, Pg 3404, 1996) Davis JC, Hughesoliver JM, Lu JC, Gyurcsik RS Journal of the Electrochemical Society, 143(12), 4129, 1996 |