검색결과 : 1건
No. | Article |
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1 |
Roles of Ion Irradiation for Crystalline Growth and Internal-Stresses in Nickel Films Onto Silicon Substrates Prepared by the Ion-Beam and Vapor-Deposition Method Kuratani N, Murakami Y, Imai O, Ebe A, Nishiyama S, Ogata K Journal of Vacuum Science & Technology A, 15(6), 3086, 1997 |