검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Experimental and numerical analyses on recovery of polymer deformation after demolding in the hot embossing process Takagi H, Takahashi M, Maeda R, Onishi Y, Iriye Y, Iwasaki T, Hirai Y Journal of Vacuum Science & Technology B, 26(6), 2399, 2008 |
| 2 |
Time dependent analysis of the resist deformation in thermal nanoimprint Hirai Y, Onishi Y, Tanabe T, Nishihata M, Iwasaki T, Kawata H, Iriye Y Journal of Vacuum Science & Technology B, 25(6), 2341, 2007 |