검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Structurally and electrically uniform deposition of high-k TiO2 thin films on a Ru electrode in three-dimensional contact holes using atomic layer deposition Kim SK, Kim KM, Kwon OS, Lee SW, Jeon CB, Park WY, Hwang CS, Jeong J Electrochemical and Solid State Letters, 8(12), F59, 2005 |
| 2 |
Study on the step coverage of metallorganic chemical vapor deposited TiO2 and SrTiO3 thin films No SY, Oh JH, Jeon CB, Schindler M, Hwang CS, Kim HJ Journal of the Electrochemical Society, 152(6), C435, 2005 |