검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Evaluation of silicon oxide cleaning using F-2/Ar remote plasma processing Kang SC, Hwang JY, Lee NE, Joo KS, Bae GH Journal of Vacuum Science & Technology A, 23(4), 911, 2005 |
| No. | Article |
|---|---|
| 1 |
Evaluation of silicon oxide cleaning using F-2/Ar remote plasma processing Kang SC, Hwang JY, Lee NE, Joo KS, Bae GH Journal of Vacuum Science & Technology A, 23(4), 911, 2005 |