화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Chemical and electronic structure of SiO2/Si interfacial transition layer
Hattori T, Takahashi K, Seman MB, Nohira H, Hirose K, Kamakura N, Takata Y, Shin S, Kobayashi K
Applied Surface Science, 212, 547, 2003
2 Depth profiling of oxynitride film formed on Si(100) by photon energy dependent photoelectron spectroscopy
Nishizaki K, Nohira H, Takahashi K, Kamakura N, Takata Y, Shin S, Kobayashi K, Tamura N, Hikazutani K, Hattori T
Applied Surface Science, 216(1-4), 287, 2003
3 Chlorosilane adsorption on clean Si surfaces: Scanning tunneling microscopy and Fourier-transform infrared absorption spectroscopy studies
Nishizawa M, Yasuda T, Yamasaki S, Shinohara M, Kamakura N, Kimura Y, Niwano M
Journal of Vacuum Science & Technology A, 19(4), 2001, 2001