검색결과 : 1건
No. | Article |
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1 |
Atomic layer deposition and characterization of zirconium oxide-erbium oxide nanolaminates Tamm A, Heikkila M, Kemel M, Kozlova J, Kukli K, Sammelselg V, Ritala M, Leskela M Thin Solid Films, 519(2), 666, 2010 |
No. | Article |
---|---|
1 |
Atomic layer deposition and characterization of zirconium oxide-erbium oxide nanolaminates Tamm A, Heikkila M, Kemel M, Kozlova J, Kukli K, Sammelselg V, Ritala M, Leskela M Thin Solid Films, 519(2), 666, 2010 |