검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Development of a low pressure microwave excited plasma and its application to the formation of microcrystalline silicon films Kikukawa D, Hori M, Honma K, Yamamoto M, Goto T, Takahashi S, Den S Journal of Vacuum Science & Technology A, 24(6), 2128, 2006 |
| 2 |
Effects of initial layers on surface roughness and crystallinity of microcrystalline silicon thin films formed by remote electron cyclotron resonance silane plasma Murata K, Kikukawa D, Hori M, Goto T, Ito M Journal of Vacuum Science & Technology A, 20(3), 953, 2002 |