검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Excited helium-induced CVD of a-Si1-xCx : H films from trimethylchlorosilane Smirnova TP, Yakovkina LV, Ayupov BM, Dolgpvesova IP, Nadolinny VA, Kitchay VN Thin Solid Films, 353(1-2), 79, 1999 |
| No. | Article |
|---|---|
| 1 |
Excited helium-induced CVD of a-Si1-xCx : H films from trimethylchlorosilane Smirnova TP, Yakovkina LV, Ayupov BM, Dolgpvesova IP, Nadolinny VA, Kitchay VN Thin Solid Films, 353(1-2), 79, 1999 |