검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High-rate deposition of MgO by reactive ac pulsed magnetron sputtering in the transition mode Kupfer H, Kleinhempel R, Richter F, Peters C, Krause U, Kopte T, Cheng Y Journal of Vacuum Science & Technology A, 24(1), 106, 2006 |