검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
The impact of post-polysilicon gate process on ultra-thin gate oxide integrity Ang CH, Ko LH, Lin WH, Zheng JZ Solid-State Electronics, 46(2), 243, 2002 |
| 2 |
Impact of nitrogen implantation into polysilicon followed by drive-in process on gate oxide integrity Cho BJ, Ko LH, Nga YA, Chan LH Journal of the Electrochemical Society, 146(11), 4259, 1999 |