검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Damage-free extreme ultraviolet mask with TaBN absorber Shoki T, Kinoshita T, Sakaya N, Hosoya M, Ohkubo R, Usui Y, Kobayshi H, Nagarekawa O Journal of Vacuum Science & Technology B, 21(6), 3021, 2003 |
| No. | Article |
|---|---|
| 1 |
Damage-free extreme ultraviolet mask with TaBN absorber Shoki T, Kinoshita T, Sakaya N, Hosoya M, Ohkubo R, Usui Y, Kobayshi H, Nagarekawa O Journal of Vacuum Science & Technology B, 21(6), 3021, 2003 |