검색결과 : 11건
No. | Article |
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1 |
A systematic investigation of the degradation mechanisms in SOI n-channel LD-MOSFETs Vandooren A, Cristoloveanu S, Conley JF, Mojarradi M, Kolawa E Solid-State Electronics, 47(9), 1419, 2003 |
2 |
Instability of amorphous Ru-Si-O thin films under thermal oxidation Gasser SM, Ruiz R, Kolawa E, Nicolet MA Journal of the Electrochemical Society, 146(4), 1546, 1999 |
3 |
Thermal reaction of Pt film with < 110 > GaN epilayer Gasser SM, Kolawa E, Nicolet MA Journal of Vacuum Science & Technology A, 17(5), 2642, 1999 |
4 |
Texture of copper films on Ta35Si18N47 and Ti33Si23N44 underlayers Tsuji Y, Gasser SM, Kolawa E, Nicolet MA Thin Solid Films, 350(1-2), 1, 1999 |
5 |
Full field measurements of curvature using coherent gradient sensing : application to thin film characterization Rosakis AJ, Singh RP, Tsuji Y, Kolawa E, Moore NR Thin Solid Films, 325(1-2), 42, 1998 |
6 |
Gold Metallization for Aluminum Nitride Shalish I, Gasser SM, Kolawa E, Nicolet MA, Ruiz RP Thin Solid Films, 289(1-2), 166, 1996 |
7 |
Reactive Ion Etching of Ta-Si-N Diffusion-Barriers in Cf4+o2 Mclane GF, Casas L, Reid JS, Kolawa E, Nicolet MA Journal of Vacuum Science & Technology B, 12(4), 2352, 1994 |
8 |
Thermal-Reaction of Ta Thin-Films with Polycrystalline Diamond Chen JS, Kolawa E, Nicolet MA, Pool FS Thin Solid Films, 236(1-2), 72, 1993 |
9 |
Amorphous W40Re40B20 Diffusion-Barriers for (Si)/Al and (Si)/Cu Metallizations Kolawa E, Sun X, Reid JS, Chen JS, Nicolet MA, Ruiz R Thin Solid Films, 236(1-2), 301, 1993 |
10 |
Evaluation of Amorphous (Mo, Ta, W)-Si-N Diffusion-Barriers for (Si)/Cu Metallizations Reid JS, Kolawa E, Ruiz RP, Nicolet MA Thin Solid Films, 236(1-2), 319, 1993 |