화학공학소재연구정보센터
검색결과 : 11건
No. Article
1 A systematic investigation of the degradation mechanisms in SOI n-channel LD-MOSFETs
Vandooren A, Cristoloveanu S, Conley JF, Mojarradi M, Kolawa E
Solid-State Electronics, 47(9), 1419, 2003
2 Instability of amorphous Ru-Si-O thin films under thermal oxidation
Gasser SM, Ruiz R, Kolawa E, Nicolet MA
Journal of the Electrochemical Society, 146(4), 1546, 1999
3 Thermal reaction of Pt film with < 110 > GaN epilayer
Gasser SM, Kolawa E, Nicolet MA
Journal of Vacuum Science & Technology A, 17(5), 2642, 1999
4 Texture of copper films on Ta35Si18N47 and Ti33Si23N44 underlayers
Tsuji Y, Gasser SM, Kolawa E, Nicolet MA
Thin Solid Films, 350(1-2), 1, 1999
5 Full field measurements of curvature using coherent gradient sensing : application to thin film characterization
Rosakis AJ, Singh RP, Tsuji Y, Kolawa E, Moore NR
Thin Solid Films, 325(1-2), 42, 1998
6 Gold Metallization for Aluminum Nitride
Shalish I, Gasser SM, Kolawa E, Nicolet MA, Ruiz RP
Thin Solid Films, 289(1-2), 166, 1996
7 Reactive Ion Etching of Ta-Si-N Diffusion-Barriers in Cf4+o2
Mclane GF, Casas L, Reid JS, Kolawa E, Nicolet MA
Journal of Vacuum Science & Technology B, 12(4), 2352, 1994
8 Thermal-Reaction of Ta Thin-Films with Polycrystalline Diamond
Chen JS, Kolawa E, Nicolet MA, Pool FS
Thin Solid Films, 236(1-2), 72, 1993
9 Amorphous W40Re40B20 Diffusion-Barriers for (Si)/Al and (Si)/Cu Metallizations
Kolawa E, Sun X, Reid JS, Chen JS, Nicolet MA, Ruiz R
Thin Solid Films, 236(1-2), 301, 1993
10 Evaluation of Amorphous (Mo, Ta, W)-Si-N Diffusion-Barriers for (Si)/Cu Metallizations
Reid JS, Kolawa E, Ruiz RP, Nicolet MA
Thin Solid Films, 236(1-2), 319, 1993