검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Fully automated hot embossing processes utilizing high resolution working stamps Glinsner T, Veres T, Kreindl G, Roy E, Morton K, Wieser T, Thanner C, Treiblmayr D, Miller R, Lindner P Journal of Vacuum Science & Technology B, 28(1), 36, 2010 |
| 2 |
High accuracy UV-nanoimprint lithography step-and-repeat master stamp fabrication for wafer level camera application Kreindl G, Glinsner T, Miller R, Treiblmayr D, Fodisch R Journal of Vacuum Science & Technology B, 28(6), C6M57, 2010 |