화학공학소재연구정보센터
검색결과 : 8건
No. Article
1 Suppression of Si cavities at the SiC/Si interface during epitaxial growth of 3C-SiC on silicon-on-insulator
Moller H, Krotz G, Eickhoff M, Nielsen A, Papaioannou V, Stoemenos J
Journal of the Electrochemical Society, 148(1), G16, 2001
2 Oxidation dependence on defect density in 3C-SiC films
Eickhoff M, Vouroutzis N, Nielsen A, Krotz G, Stoemenos J
Journal of the Electrochemical Society, 148(6), G336, 2001
3 Improvement of the 3C-SiC/Si interface by flash lamp annealing
Panknin D, Stoemenos J, Eickhoff M, Heera V, Vouroutzis N, Krotz G, Skorupa W
Materials Science Forum, 353-356, 151, 2001
4 Selective deposition of 3C-SiC epitaxially grown on SOI subtrates
Eickhoff M, Zappe S, Nielsen A, Krotz G, Obermeier E, Vouroutzis N, Stoemenos J
Materials Science Forum, 353-356, 175, 2001
5 Dependence of wet oxidation on the defect density in 3C-SiC
Eickhoff M, Vouroutzis N, Nielsen A, Krotz G, Stoemenos J
Materials Science Forum, 353-356, 663, 2001
6 High temperature 10 bar pressure sensor based on 3C-SiC/SOI for turbine control applications
Zappe S, Franklin J, Obermeier E, Eickhoff M, Moller H, Krotz G, Rougeot C, Lefort O, Stoemenos J
Materials Science Forum, 353-356, 753, 2001
7 SOL thinning effects on 3C-SiC on SOI
Planes N, Moller H, Camassel J, Stoemenos Y, Falkovski L, Eickhoff M, Krotz G
Materials Science Forum, 338-3, 301, 2000
8 Structural characteristics of 3C-SiC films epitaxially grown on the Si/Si3N4/SiO2 system
Zappe S, Moller H, Krotz G, Eickhoff M, Skorupa W, Obermeier E, Stoemenos J
Materials Science Forum, 338-3, 529, 2000