검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Thermal analysis of diamondlike carbon membrane masks in projection electron-beam lithography Babin S, Butomo V, Kuzmin IY, Yamashita H, Yamabe M Journal of Vacuum Science & Technology B, 22(6), 3082, 2004 |
| 2 |
Experimental verification of the TEMPTATION (temperature simulation) software tool Babin S, Kuzmin IY Journal of Vacuum Science & Technology B, 16(6), 3241, 1998 |