검색결과 : 1건
No. | Article |
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1 |
Lattice kinetic Monte Carlo simulation of epitaxial growth of silicon thin films in H-2/SiH4 chemical vapor deposition systems Balbuena JP, Martin-Bragado I Thin Solid Films, 634, 121, 2017 |
No. | Article |
---|---|
1 |
Lattice kinetic Monte Carlo simulation of epitaxial growth of silicon thin films in H-2/SiH4 chemical vapor deposition systems Balbuena JP, Martin-Bragado I Thin Solid Films, 634, 121, 2017 |