검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Experimental results of the stochastic Coulomb interaction in ion projection lithography de Jager PWH, Derksen G, Mertens B, Cekan E, Lammer G, Vonach H, Buschbeck H, Zeininger M, Horner C, Loschner H, Stengl G, Bleeker AJ, Benschop J, Shi F, Volland B, Hudek P, Heerlein H, Rangelow IW, Kaesmaier R Journal of Vacuum Science & Technology B, 17(6), 3098, 1999 |
| 2 |
p-n junction-based wafer flow process for stencil mask fabrication Rangelow IW, Shi F, Volland B, Sossna E, Petrashenko A, Hudek P, Sunyk R, Butschke J, Letzkus F, Springer R, Ehrmann A, Gross G, Kaesmaier R, Oelmann A, Struck T, Unger G, Chalupka A, Haugeneder E, Lammer G, Loschner H, Tejeda R, Lovell E, Engelstad R Journal of Vacuum Science & Technology B, 16(6), 3592, 1998 |
| 3 |
Optimization of the temperature distribution across stencil mask membranes under ion beam exposure Kim B, Engelstad R, Lovell E, Chalupka A, Haugeneder E, Lammer G, Loschner H, Lutz J, Stengl G Journal of Vacuum Science & Technology B, 16(6), 3602, 1998 |
| 4 |
Stochastic Coulomb interactions in ion projection lithography systems with aberration-broadened crossover Kruit P, Barth JE, Lammer G, Chalupka A, Vonach H, Loschner H, Stengl G Journal of Vacuum Science & Technology B, 15(6), 2369, 1997 |
| 5 |
Novel Electrostatic Column for Ion Projection Lithography Chalupka A, Stengl G, Buschbeck H, Lammer G, Vonach H, Fischer R, Hammel E, Loschner H, Nowak R, Wolf P, Finkelstein W, Hill RW, Berry IL, Harriott LR, Melngailis J, Randall JN, Wolfe JC, Stroh H, Wollnik H, Mondelli AA, Petillo JJ, Leung K Journal of Vacuum Science & Technology B, 12(6), 3513, 1994 |
| 6 |
Experimental Investigation of Stochastic Space-Charge Effects on Pattern Resolution in Ion Projection Lithography Systems Hammel E, Chalupka A, Fegerl J, Fischer R, Lammer G, Loschner H, Malek L, Nowak R, Stengl G, Vonach H, Wolf P, Brunger WH, Buchmann LM, Torkler M, Cekan E, Fallmann W, Paschke F, Stangl G, Thalinger F, Berry IL, Harriott LR, Finkelstein W, Hill RW Journal of Vacuum Science & Technology B, 12(6), 3533, 1994 |
| 7 |
Projection Ion-Beam Lithography Loschner H, Stengl G, Chalupka A, Fegerl J, Fischer R, Hammel E, Lammer G, Malek L, Nowak R, Traher C, Vonach H, Wolf P, Hill RW Journal of Vacuum Science & Technology B, 11(6), 2409, 1993 |