검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Crystallinity of Electrically Scaled Atomic Layer Deposited HfO2 from a Cyclical Deposition and Annealing Scheme Consiglio S, Clark RD, Bersch E, LaRose JD, Wells I, Tapily K, Leusink GJ, Diebold AC Journal of the Electrochemical Society, 159(6), G80, 2012 |
| 2 |
Extension of Far UV spectroscopic ellipsometry studies of High-kappa dielectric films to 130 nm Kamineni VK, Hilfiker JN, Freeouf JL, Consiglio S, Clark R, Leusink GJ, Diebold AC Thin Solid Films, 519(9), 2894, 2011 |
| 3 |
The Hydrogen Reduction of Wf6 - A Kinetic-Study Based on in-Situ Partial-Pressure Measurements Oosterlaken TG, Leusink GJ, Janssen GC, Radelaar S Journal of the Electrochemical Society, 143(5), 1668, 1996 |
| 4 |
The Effect of Doping Atoms on the Kinetics of Self-Limiting Tungsten Film Growth on Silicon by Reduction of Tungsten Hexafluoride Vanderjeugd CA, Leusink GJ, Oosterlaken TG, Jongste JF, Janssen GC, Radelaar S Journal of the Electrochemical Society, 142(4), 1326, 1995 |