검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Thin polymer films viscosity measurements from nanopatterning method Leveder T, Landis S, Chaix N, Davoust L Journal of Vacuum Science & Technology B, 28(6), 1251, 2010 |
| 2 |
Nanoimprint lithography processes on 200 mm Si wafer for optical application: Residual thickness etching anisotropy Chaix N, Gourgon C, Perret C, Landis S, Leveder T Journal of Vacuum Science & Technology B, 25(6), 2346, 2007 |
| 3 |
Surface characterization of imprinted resist above glass transition temperature Leveder T, Landis S, Davoust L, Soulan S, Tortai JH, Chaix N Journal of Vacuum Science & Technology B, 25(6), 2365, 2007 |
| 4 |
Influence of mold depth on capillary bridges in nanoimprint lithography Chaix N, Landis S, Hermelin D, Leveder T, Perret C, Delaye V, Gourgon C Journal of Vacuum Science & Technology B, 24(6), 3011, 2006 |