검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Nucleation and growth of CVD Al on different types of TiN Avinun M, Barel N, Kaplan WD, Eizenberg M, Naik M, Guo T, Chen LY, Mosely R, Littau K, Zhou S, Chen L Thin Solid Films, 320(1), 67, 1998 |
| 2 |
Chemical-Vapor-Deposited Ticn - A New Barrier Metallization for Submicron via and Contact Applications Eizenberg M, Littau K, Ghanayem S, Liao M, Mosely R, Sinha AK Journal of Vacuum Science & Technology A, 13(3), 590, 1995 |