검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Improvement of the wiggling profile of spin-on carbon hard mask by H-2 plasma treatment Tadokoro M, Yonekura K, Yoshikawa K, Ono Y, Ishibashi T, Hanawa T, Fujiwara N, Matsunobe T, Matsuda K Journal of Vacuum Science & Technology B, 26(1), 67, 2008 |
| 2 |
Characterization of fluorine-doped silicon dioxide films by Raman spectroscopy and Electron-spin resonance Matsuda K, Yamaguchi Y, Morita N, Matsunobe T, Yoshikawa M Thin Solid Films, 515(17), 6682, 2007 |
| 3 |
Characterization of fluorine-doped silicon dioxide film by Raman spectroscopy Yoshikawa M, Iwagami K, Morita N, Matsunobe T, Ishida H Thin Solid Films, 310(1-2), 167, 1997 |
| 4 |
Epitaxial-Growth of Alpha-Copper Phthalocyanine Crystal on Si(001) Substrate by Organic Molecular-Beam Deposition Nonaka T, Nakagawa Y, Mori Y, Hirai M, Matsunobe T, Nakamura M, Takahagi T, Ishitani A, Lin H Thin Solid Films, 256(1-2), 262, 1995 |