화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Nanolithography in the evanescent near field
Alkaisi MM, Blaikie RJ, McNab SJ
Advanced Materials, 13(12-13), 877, 2001
2 Analytic study of gratings patterned by evanescent near field optical lithography
McNab SJ, Blaikie RJ, Alkaisi MM
Journal of Vacuum Science & Technology B, 18(6), 2900, 2000
3 Nanolithography using wet etched silicon nitride phase mass
Alkaisi MM, Blaikie RJ, McNab SJ
Journal of Vacuum Science & Technology B, 16(6), 3929, 1998